Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater

Johannes Rattenberger; Alexander Melischnig; Ilse Letofsky-Papst; Thomas Ganner; Hartmuth Schröttner

Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater

Johannes Rattenberger
, Alexander Melischnig
, Ilse Letofsky-Papst
, Thomas Ganner
, Hartmuth Schröttner

Research output: Non-print form › Website / Web publication

Abstract

Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.

Original language	English
Publisher	Leica Microsystems
Publication status	Published - 9 Mar 2016

ASJC Scopus subject areas

General Materials Science

Fields of Expertise

Advanced Materials Science

Treatment code (Nähere Zuordnung)

Basic - Fundamental (Grundlagenforschung)

Access to Document

http://www.leica-microsystems.com/index.php?&ADMCMD_prev=a3a962abff96a08b8187efdf14b4828f&id=17645&L=0

Cite this

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title = "Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater",

abstract = "Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.",

author = "Johannes Rattenberger and Alexander Melischnig and Ilse Letofsky-Papst and Thomas Ganner and Hartmuth Schr{\"o}ttner",

note = "Leica Science Lab",

year = "2016",

month = mar,

day = "9",

language = "English",

publisher = "Leica Microsystems",

address = "Austria",

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TY - ADVS

T1 - Improvement of Metallic Thin Films for HR-SEM by Using DC Magnetron Sputter Coater

AU - Rattenberger, Johannes

AU - Melischnig, Alexander

AU - Letofsky-Papst, Ilse

AU - Ganner, Thomas

AU - Schröttner, Hartmuth

N1 - Leica Science Lab

PY - 2016/3/9

Y1 - 2016/3/9

N2 - Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.

AB - Preparation techniques, like several kinds of coating methods play an important role for high resolution scanning electron microscopy (HR-SEM). Nonconductive sample like biological and synthetic samples have to be prepared with a thin conductive layer to prevent charging.

M3 - Website / Web publication

PB - Leica Microsystems

ER -