Dual-Functional 3D-Nanoprinted AFM Probes for Correlative Magnetic and Conductive Characterization

Based on previously reported 3D nanoprinted probes for magnetic forcemicroscopy (MFM), a new class of dual-functional atomic force microscopy(AFM) probes – termed MC-Probes – is presented that integrates magnetic(M) and conductive (C) functionality in a single, monolithic structure.3D nanoprinting via Focused Electron Beam Induced Deposition allows directexploitation of the intrinsic magnetic and conductive properties of theemployed Co3Fe precursor. The coating-free probes feature sub-10 nm apexradii combined with a mechanically robust pillar geometry, designed tosupport both contact and tapping-mode operation depending on thecantilever choice. Comprehensive characterization reveals electrical resistivity≈ 2 × 103 · μ𝛀 · cm and full tip resistances of, ∼ 1 − 10k𝛀 comparable tocommercial conductive probes. Mechanical tests confirm apex durabilityunder contact-mode loads up to. 3 − 4N · m−1 MC-Probe functionality isdemonstrated through conductive AFM (CAFM) and MFM measurementsperformed in the FUSIONScope™ on custom SiO2/Au/Co3Fe test structures.While the current cantilever availability required separate cantileversoptimized for contact and tapping operation, the results establish thefoundation for future single-cantilever dual-mode integration. Beyond thepresent study, MC-Probes open promising perspectives for streamlinedcorrelative investigations across CAFM, MFM, Kelvin probe force microscopy,electrostatic force microscopy, scanning spreading resistance microscopy, andrelated advanced AFM modes.